Annual report pursuant to Section 13 and 15(d)

Related Party Transactions (Details)

v3.5.0.2
Related Party Transactions (Details) - USD ($)
$ in Thousands
3 Months Ended 12 Months Ended
Jun. 30, 2016
Mar. 31, 2016
Sep. 30, 2016
Sep. 30, 2015
Sep. 30, 2014
Sep. 16, 2015
Related Party Transaction [Line Items]            
Gain on sale of other assets     $ 2,576 $ 0 $ 0  
Kingstone Holding Company            
Related Party Transaction [Line Items]            
Ownership percentage       15.00%    
Exclusive Sales and Service Rights in Solar Ion Implant Equipment            
Related Party Transaction [Line Items]            
Proceeds from license fees received   $ 4,900        
Gain on sale of other assets $ 2,600          
Accounts Receivable | Kingstone            
Related Party Transaction [Line Items]            
Due from related parties     300      
Kingstone | Kingstone Holding Company            
Related Party Transaction [Line Items]            
Ownership percentage           15.00%
SoLayTec, B.V.            
Related Party Transaction [Line Items]            
Due to related party     $ 1,100      
TNO Technostarters B.V. Loans | Minimum            
Related Party Transaction [Line Items]            
Interest rate     9.50%      
TNO Technostarters B.V. Loans | Maximum            
Related Party Transaction [Line Items]            
Interest rate     12.50%