<?xml version="1.0" encoding="UTF-8" ?><!-- Generated on Thu, 16 Apr 2026 00:18:40 -0400--><rss version="2.0">
    <channel>
        <title>Amtech Systems, Inc. (ASYS) SEC Filings</title>
        <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/rss</link>
        <description>Amtech Systems, Inc. (ASYS) - All SEC Filings</description>
        <language>en-us</language>
                                            <image>
                <url>https://d1io3yog0oux5.cloudfront.net/_d06263ffa350f6e22e16620b63ae2863/amtechsystems/files/theme/images/logo-sm.png</url>
                <title>Amtech Systems, Inc. Logo</title>
                <link>/investors</link>
            </image>
                <generator>Equisolve Investor Relations Suite</generator>
        
                            <item>
                <title><![CDATA[EFFECT - Notice of Effectiveness]]></title>
                <description><![CDATA[EFFECT]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/9999999995-26-000911/9999999995-26-000911.pdf</link>
                <pubDate>Tue, 24 Mar 26 06:07:25 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/9999999995-26-000911/9999999995-26-000911.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[S-3 - Registration statement under Securities Act of 1933]]></title>
                <description><![CDATA[6 Related Documents: S-3, EX-4.1, EX-4.2, EX-5.1, EX-23.1, EX-FILING FEES]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000002/0000720500-26-000002.pdf</link>
                <pubDate>Fri, 13 Mar 26 17:00:02 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000002/0000720500-26-000002.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[4 - Statement of changes in beneficial ownership of securities]]></title>
                <description><![CDATA[4]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001256949-26-000003/0001256949-26-000003.pdf</link>
                <pubDate>Fri, 06 Mar 26 17:02:05 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001256949-26-000003/0001256949-26-000003.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[4 - Statement of changes in beneficial ownership of securities]]></title>
                <description><![CDATA[4]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096720/0001193125-26-096720.pdf</link>
                <pubDate>Fri, 06 Mar 26 16:39:22 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096720/0001193125-26-096720.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[4 - Statement of changes in beneficial ownership of securities]]></title>
                <description><![CDATA[4]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-024720/0001104659-26-024720.pdf</link>
                <pubDate>Fri, 06 Mar 26 16:20:19 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-024720/0001104659-26-024720.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[4 - Statement of changes in beneficial ownership of securities]]></title>
                <description><![CDATA[4]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096467/0001193125-26-096467.pdf</link>
                <pubDate>Fri, 06 Mar 26 16:06:13 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096467/0001193125-26-096467.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[8-K - Current report]]></title>
                <description><![CDATA[8-K]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000001/0000720500-26-000001.pdf</link>
                <pubDate>Fri, 06 Mar 26 11:57:54 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000001/0000720500-26-000001.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[SCHEDULE 13G/A - Statement of Beneficial Ownership by Certain Investors]]></title>
                <description><![CDATA[SCHEDULE 13G/A]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001398344-26-003122/0001398344-26-003122.pdf</link>
                <pubDate>Tue, 14 Apr 26 13:05:20 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001398344-26-003122/0001398344-26-003122.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[10-Q - Quarterly report [Sections 13 or 15(d)]]]></title>
                <description><![CDATA[6 Related Documents: 10-Q, EX-10.1, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-039360/0001193125-26-039360.pdf</link>
                <pubDate>Thu, 05 Feb 26 16:06:51 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-039360/0001193125-26-039360.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[8-K - Current report]]></title>
                <description><![CDATA[2 Related Documents: 8-K, EX-99.1]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-039351/0001193125-26-039351.pdf</link>
                <pubDate>Thu, 05 Feb 26 16:02:44 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-039351/0001193125-26-039351.pdf</guid>
                                                                            </item>
            </channel>
</rss>