<?xml version="1.0" encoding="UTF-8" ?><!-- Generated on Mon, 15 Jun 2026 21:01:22 -0400--><rss version="2.0">
    <channel>
        <title>Amtech Systems, Inc. (ASYS) SEC Filings</title>
        <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/rss</link>
        <description>Amtech Systems, Inc. (ASYS) - All SEC Filings</description>
        <language>en-us</language>
                                            <image>
                <url>https://d1io3yog0oux5.cloudfront.net/_d06263ffa350f6e22e16620b63ae2863/amtechsystems/files/theme/images/logo-sm.png</url>
                <title>Amtech Systems, Inc. Logo</title>
                <link>/investors</link>
            </image>
                <generator>Equisolve Investor Relations Suite</generator>
        
                            <item>
                <title><![CDATA[8-K - Current report]]></title>
                <description><![CDATA[6 Related Documents: 8-K, EX-1.1, EX-5.1, EX-99.1, EX-99.2, EX-99.3]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000008/0000720500-26-000008.pdf</link>
                <pubDate>Wed, 03 Jun 26 16:32:32 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000008/0000720500-26-000008.pdf</guid>
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                    <item>
                <title><![CDATA[424B5 - Prospectus [Rule 424(b)(5)]]]></title>
                <description><![CDATA[2 Related Documents: 424B5, EX-FILING FEES]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000007/0000720500-26-000007.pdf</link>
                <pubDate>Wed, 03 Jun 26 06:03:02 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000007/0000720500-26-000007.pdf</guid>
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                    <item>
                <title><![CDATA[SCHEDULE 13D/A - General Statement of Acquisition of Beneficial Ownership]]></title>
                <description><![CDATA[2 Related Documents: SCHEDULE 13D/A, EX-99.(G)]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-069614/0001104659-26-069614.pdf</link>
                <pubDate>Tue, 02 Jun 26 19:29:37 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-069614/0001104659-26-069614.pdf</guid>
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                    <item>
                <title><![CDATA[S-3MEF - Registration adding securities to prior Form S-3 registration [Rule 462(b)]]]></title>
                <description><![CDATA[4 Related Documents: S-3MEF, EX-5.1, EX-23.1, EX-FILING FEES]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000006/0000720500-26-000006.pdf</link>
                <pubDate>Mon, 01 Jun 26 19:57:48 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000006/0000720500-26-000006.pdf</guid>
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                    <item>
                <title><![CDATA[424B5 - Prospectus [Rule 424(b)(5)]]]></title>
                <description><![CDATA[424B5]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000005/0000720500-26-000005.pdf</link>
                <pubDate>Mon, 01 Jun 26 16:08:29 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000005/0000720500-26-000005.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[4 - Statement of changes in beneficial ownership of securities]]></title>
                <description><![CDATA[4]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-068888/0001104659-26-068888.pdf</link>
                <pubDate>Mon, 01 Jun 26 16:03:45 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-068888/0001104659-26-068888.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[4 - Statement of changes in beneficial ownership of securities]]></title>
                <description><![CDATA[4]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0002136935-26-000002/0002136935-26-000002.pdf</link>
                <pubDate>Fri, 29 May 26 13:40:13 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0002136935-26-000002/0002136935-26-000002.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[3 - Initial statement of beneficial ownership of securities]]></title>
                <description><![CDATA[3]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0002136935-26-000001/0002136935-26-000001.pdf</link>
                <pubDate>Fri, 29 May 26 13:36:24 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0002136935-26-000001/0002136935-26-000001.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[4 - Statement of changes in beneficial ownership of securities]]></title>
                <description><![CDATA[4]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001223192-26-000003/0001223192-26-000003.pdf</link>
                <pubDate>Fri, 29 May 26 13:35:33 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001223192-26-000003/0001223192-26-000003.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[3 - Initial statement of beneficial ownership of securities]]></title>
                <description><![CDATA[3]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001223192-26-000002/0001223192-26-000002.pdf</link>
                <pubDate>Fri, 29 May 26 13:32:05 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001223192-26-000002/0001223192-26-000002.pdf</guid>
                                                                            </item>
            </channel>
</rss>