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        <title>Amtech Systems, Inc. (ASYS) SEC Filings</title>
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        <description>Amtech Systems, Inc. (ASYS) - All SEC Filings</description>
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                <title><![CDATA[SCHEDULE 13G/A - Statement of Beneficial Ownership by Certain Investors]]></title>
                <description><![CDATA[SCHEDULE 13G/A]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001325447-26-000032/0001325447-26-000032.pdf</link>
                <pubDate>Thu, 06 Aug 26 16:59:53 -0400</pubDate>
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                <title><![CDATA[4 - Statement of changes in beneficial ownership of securities]]></title>
                <description><![CDATA[4]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001223192-26-000004/0001223192-26-000004.pdf</link>
                <pubDate>Wed, 05 Aug 26 16:42:39 -0400</pubDate>
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                <title><![CDATA[4 - Statement of changes in beneficial ownership of securities]]></title>
                <description><![CDATA[4]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0002136935-26-000003/0002136935-26-000003.pdf</link>
                <pubDate>Wed, 05 Aug 26 16:39:17 -0400</pubDate>
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                <title><![CDATA[4 - Statement of changes in beneficial ownership of securities]]></title>
                <description><![CDATA[4]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001267540-26-000001/0001267540-26-000001.pdf</link>
                <pubDate>Wed, 05 Aug 26 16:39:14 -0400</pubDate>
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                <title><![CDATA[8-K - Current report]]></title>
                <description><![CDATA[2 Related Documents: 8-K, EX-10.1]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000011/0000720500-26-000011.pdf</link>
                <pubDate>Wed, 05 Aug 26 16:33:18 -0400</pubDate>
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                <title><![CDATA[10-Q - Quarterly report [Sections 13 or 15(d)]]]></title>
                <description><![CDATA[7 Related Documents: 10-Q, EX-10.2, EX-10.3, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000010/0000720500-26-000010.pdf</link>
                <pubDate>Wed, 05 Aug 26 16:08:17 -0400</pubDate>
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                <title><![CDATA[8-K - Current report]]></title>
                <description><![CDATA[2 Related Documents: 8-K, EX-99.1]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000009/0000720500-26-000009.pdf</link>
                <pubDate>Wed, 05 Aug 26 16:02:05 -0400</pubDate>
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                <title><![CDATA[SCHEDULE 13G - Statement of Beneficial Ownership by Certain Investors]]></title>
                <description><![CDATA[SCHEDULE 13G]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001493152-26-034783/0001493152-26-034783.pdf</link>
                <pubDate>Mon, 27 Jul 26 16:07:10 -0400</pubDate>
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                <title><![CDATA[8-K - Current report]]></title>
                <description><![CDATA[6 Related Documents: 8-K, EX-1.1, EX-5.1, EX-99.1, EX-99.2, EX-99.3]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000008/0000720500-26-000008.pdf</link>
                <pubDate>Wed, 03 Jun 26 16:32:32 -0400</pubDate>
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                <title><![CDATA[424B5 - Prospectus [Rule 424(b)(5)]]]></title>
                <description><![CDATA[2 Related Documents: 424B5, EX-FILING FEES]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000720500-26-000007/0000720500-26-000007.pdf</link>
                <pubDate>Wed, 03 Jun 26 06:03:02 -0400</pubDate>
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