Annual report pursuant to Section 13 and 15(d)

Acquisitions - Consideration Transferred (Details)

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Acquisitions - Consideration Transferred (Details) - BTU International, Inc (BTU) Merger
$ / shares in Units, shares in Thousands, $ in Thousands
Jan. 30, 2015
USD ($)
$ / shares
shares
Business Acquisition [Line Items]  
Exchange ratio 0.3291
Amtech common stock issued for consideration 3,186
Amtech common stock per share price on January 30, 2015 | $ / shares $ 8.20
Consideration for BTU common shares and restricted stock units | $ $ 26,125
Total fair value of consideration transferred | $ $ 26,625
Common And Restricted Shares  
Business Acquisition [Line Items]  
BTU common shares and restricted stock units exchanged 9,681
Vested BTU stock options exchanged for Amtech stock options 9,681
Stock Options  
Business Acquisition [Line Items]  
BTU common shares and restricted stock units exchanged 500
Vested BTU stock options exchanged for Amtech stock options 500