Annual report pursuant to Section 13 and 15(d)

Selected Quarterly Data (Unaudited) (Details)

v3.5.0.2
Selected Quarterly Data (Unaudited) (Details) - USD ($)
$ / shares in Units, shares in Thousands, $ in Thousands
3 Months Ended 12 Months Ended
Sep. 30, 2016
Jun. 30, 2016
Mar. 31, 2016
Dec. 31, 2015
Sep. 30, 2015
Jun. 30, 2015
Mar. 31, 2015
Dec. 31, 2014
Sep. 30, 2016
Sep. 30, 2015
Sep. 30, 2014
Selected Quarterly Data (Unaudited) [Abstract]                      
Revenue $ 42,409 $ 33,342 $ 22,483 $ 22,074 $ 28,198 $ 40,016 $ 24,273 $ 12,396 $ 120,308 $ 104,883 $ 56,501
Gross margin 12,476 9,631 6,001 5,955 6,563 10,128 6,889 3,428 34,063 27,008 11,626
Provision for income taxes 1,060 70 1,670 300 1,270 290 170 180 3,100 1,910 1,240
Net income (loss) attributable to Amtech Systems, Inc. (285) (1,209) (1,499) (4,015) 1,349 (1,604) (2,321) (5,195) (7,008) (7,771) (13,047)
Comprehensive income (loss) attributable to Amtech Systems, Inc. $ (276) $ (1,483) $ (909) $ (4,550) $ 1,414 $ (1,344) $ (4,470) $ (6,247) $ (8,749) $ (9,727) $ (15,491)
Net income (loss) per share attributable to Amtech Systems, Inc.:                      
Basic (dollars per share) $ (0.02) $ (0.09) $ (0.11) $ (0.31) $ 0.10 $ (0.12) $ (0.19) $ (0.53) $ (0.53) $ (0.65) $ (1.34)
Shares used in calculation, basic 13,177 13,173 13,169 13,152 13,150 13,103 11,997 9,854 13,168 12,022 9,732
Diluted (dollars per share) $ (0.02) $ (0.09) $ (0.11) $ (0.31) $ 0.10 $ (0.12) $ (0.19) $ (0.53) $ (0.53) $ (0.65) $ (1.34)
Shares used in calculation, diluted 13,177 13,173 13,169 13,152 13,259 13,103 11,997 9,854 13,168 12,022 9,732