Amtech Systems, Inc. Annual report pursuant to Section 13 and 15(d)

Annual report pursuant to Section 13 and 15(d)

Cover
- Document and Entity Information
Financial Statements
Notes to Financial Statements
Accounting Policies
- Summary of Significant Accounting Policies (Policies)
Notes Tables
Notes Details

Stock-Based Compensation (Stock Options Valuation) (Details)

v3.5.0.2

Stock-Based Compensation (Stock Options Valuation) (Details) - Stock Options - $ / shares	12 Months Ended
	Sep. 30, 2016	Sep. 30, 2015	Sep. 30, 2014
Options [Roll Forward]
Outstanding at beginning of period (in shares)	1,627,477	1,063,324	1,059,567
Granted (in shares)	360,075	327,500	272,906
Assumed - merger (shares)	0	367,229	0
Exercised (in shares)	(15,346)	(94,701)	(263,643)
Forfeited/canceled (in shares)	(130,639)	(35,875)	(5,506)
Outstanding at end of period (in shares)	1,841,567	1,627,477	1,063,324
Weighted Average Exercise Price [Abstract]
Outstanding at beginning of period (usd per share)	$ 9.11	$ 7.37	$ 6.71
Granted (usd per share)	5.25	9.74	7.01
Assumed - merger (usd per share)	0.00	14.19	0.00
Exercised (usd per share)	3.28	5.52	4.31
Forfeited (usd per share)	12.86	24.71	9.63
Outstanding at end of period (usd per share)	$ 8.15	$ 9.11	$ 7.37
Exercisable at end of period (in shares)	1,127,611	1,002,421	674,237
Exercisable at end of period, weighted average exercise price (usd per share)	$ 8.92	$ 9.74	$ 8.18
Weighted average grant-date fair value of options granted during the period (usd per share)	$ 3.03	$ 5.91	$ 4.38

- Definition

Share-based Compensation Arrangement by Share-based Payment Award, Options, Assumed In Merger

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Share-based Compensation Arrangements by Share-based Payment Award, Options, Assumed In Merger, Weighted Average Exercise Price

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The number of shares into which fully or partially vested stock options outstanding as of the balance sheet date can be currently converted under the option plan.

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The weighted-average price as of the balance sheet date at which grantees can acquire the shares reserved for issuance on vested portions of options outstanding and currently exercisable under the stock option plan.

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The number of shares under options that were cancelled during the reporting period as a result of occurrence of a terminating event specified in contractual agreements pertaining to the stock option plan.

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Gross number of share options (or share units) granted during the period.

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The weighted average grant-date fair value of options granted during the reporting period as calculated by applying the disclosed option pricing methodology.

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Number of options outstanding, including both vested and non-vested options.

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A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.

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Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan.

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Weighted average price at which option holders acquired shares when converting their stock options into shares.

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Weighted average price at which grantees could have acquired the underlying shares with respect to stock options that were terminated.

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Weighted average per share amount at which grantees can acquire shares of common stock by exercise of options.

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Number of share options (or share units) exercised during the current period.

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