Quarterly report pursuant to Section 13 or 15(d)

Document and Entity Information

v3.3.1.900
Document and Entity Information - shares
3 Months Ended
Dec. 31, 2015
Jan. 29, 2016
Document and Entity Information [Abstract]    
Entity Registrant Name AMTECH SYSTEMS INC  
Entity Central Index Key 0000720500  
Current Fiscal Year End Date --09-30  
Entity Filer Category Accelerated Filer  
Document Type 10-Q  
Document Period End Date Dec. 31, 2015  
Document Fiscal Year Focus 2015  
Document Fiscal Period Focus Q1  
Amendment Flag false  
Entity Common Stock, Shares Outstanding   13,167,509