Annual report pursuant to Section 13 and 15(d)

Document and Entity Information

v2.4.0.8
Document and Entity Information (USD $)
In Thousands, except Share data, unless otherwise specified
12 Months Ended
Sep. 30, 2014
Nov. 10, 2014
Mar. 31, 2014
Document and Entity Information [Abstract]      
Entity Registrant Name AMTECH SYSTEMS INC    
Entity Central Index Key 0000720500    
Current Fiscal Year End Date --09-30    
Entity Filer Category Accelerated Filer    
Document Type 10-K    
Document Period End Date Sep. 30, 2014    
Document Fiscal Year Focus 2014    
Document Fiscal Period Focus FY    
Amendment Flag false    
Entity Common Stock, Shares Outstanding   9,848,253  
Entity Well-known Seasoned Issuer No    
Entity Voluntary Filers No    
Entity Current Reporting Status Yes    
Entity Public Float     $ 108,207