Amtech Systems, Inc. Quarterly report pursuant to Section 13 or 15(d)

Equity and Stock-Based Compensation (Tables)

9 Months Ended

Jun. 30, 2023

The following table summarizes our stock option activity during the nine months ended June 30, 2023:


	Options			Weighted Average Exercise Price
Outstanding at beginning of period		589,341		$	8.06
Granted		166,500			9.12
Exercised		(58,813	)		5.38
Forfeited		(43,850	)		11.10
Outstanding at end of period		653,178		$	8.37
Exercisable at end of period		412,192		$	7.55
Weighted average fair value of options granted during the period	$	4.74

The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:

The following table summarizes our RSU activity during the nine months ended June 30, 2023:


	Number			Weighted Average Grant Date Fair Value
Nonvested at beginning of year		—		$	—
Granted		23,421			9.56
Released		(3,000	)		9.61
Forfeited		—			—
Nonvested at end of period		20,421		$	9.55