Amtech Systems, Inc. Quarterly report pursuant to Section 13 or 15(d)

Quarterly report pursuant to Section 13 or 15(d)

Cover
- Document and Entity Information
Financial Statements
Notes to Financial Statements
Accounting Policies
- Basis of Presentation and Significant Accounting Policies (Policies)
Notes Tables
Notes Details

Subsequent Events - Additional Information (Details)

v3.22.4

Subsequent Events - Additional Information (Details) - Subsequent Event [Member] - USD ($)	Feb. 07, 2023	Jan. 17, 2023	Feb. 08, 2023
Stock Repurchase Program
Subsequent Event [Line Items]
Authorized stock repurchase amount	$ 5,000,000
Stock repurchase program period	1 year
Loan and Security Agreement \| Each Fiscal Quarter Thereafter
Subsequent Event [Line Items]
Debt to EBITDA ratio		1.00%
Loan and Security Agreement \| Minimum
Subsequent Event [Line Items]
Consolidated working capital		$ 35,000,000.0
Loan and Security Agreement \| Maximum
Subsequent Event [Line Items]
Operating lease or rent expense ratio		1.30%
Loan and Security Agreement \| Maximum \| Through December 31, 2024
Subsequent Event [Line Items]
Debt to EBITDA ratio		1.50%
Loan and Security Agreement \| UMB Bank, N.A., \| Revolving Loan Facility
Subsequent Event [Line Items]
Debt instruments carrying value			$ 0
Loan facility available		$ 8,000,000.0
Loan facility maturity date		Jan. 17, 2024
Loan and Security Agreement \| UMB Bank, N.A., \| Term Loan
Subsequent Event [Line Items]
Debt instruments carrying value		$ 12,000,000.0
Debt instrument maturity date		Jan. 17, 2028
Entrepix, Inc.,
Subsequent Event [Line Items]
Business acquisition, percentage of voting interests acquired		100.00%
Business acquisition, purchase price paid		$ 35,000,000.0

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