Amtech Systems, Inc. Quarterly report pursuant to Section 13 or 15(d)

Income Taxes - Additional Information (Details) - USD ($)	3 Months Ended
	Dec. 31, 2022	Dec. 31, 2021
Income Tax Disclosure [Abstract]
Effective income tax rate	0.10%	13.80%
U.S. federal statutory rate	21.00%
Income tax (benefit) expense	$ (4,000)	$ 160,000

Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.