Amtech Systems, Inc. Quarterly report pursuant to Section 13 or 15(d)

Quarterly report pursuant to Section 13 or 15(d)

Cover
- Document and Entity Information
Financial Statements
Notes to Financial Statements
Accounting Policies
- Basis of Presentation and Significant Accounting Policies (Policies)
Notes Tables
Notes Details

Equity and Stock-Based Compensation - Additional Information (Details)

v3.22.0.1

Equity and Stock-Based Compensation - Additional Information (Details) - USD ($)			3 Months Ended
	Feb. 16, 2021	Feb. 10, 2020	Dec. 31, 2021	Dec. 31, 2020	Mar. 31, 2020
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Stock-based compensation expense			$ 103,000	$ 65,000
Total cost of shares repurchased and retired			$ 2,713,000
2020 Stock Repurchase Plan
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Authorized stock repurchase amount		$ 4,000,000
Stock repurchase program period		1 year
Shares repurchased and retired during the period					366,000
Total cost of shares repurchased and retired					$ 2,000,000.0
Average price per share of shares repurchased					$ 5.46
2021 Stock Repurchase Plan
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Authorized stock repurchase amount	$ 4,000,000
Stock repurchase program period	1 year
Shares repurchased and retired during the period			291,383
Total cost of shares repurchased and retired			$ 2,700,000
Average price per share of shares repurchased			$ 9.31

- Definition

Amount of noncash expense for share-based payment arrangement.

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