Quarterly report pursuant to Section 13 or 15(d)

Document and Entity Information

v3.7.0.1
Document and Entity Information - shares
9 Months Ended
Jun. 30, 2017
Aug. 04, 2017
Document and Entity Information [Abstract]    
Entity Registrant Name AMTECH SYSTEMS INC  
Entity Central Index Key 0000720500  
Current Fiscal Year End Date --09-30  
Entity Filer Category Accelerated Filer  
Document Type 10-Q  
Document Period End Date Jun. 30, 2017  
Document Fiscal Year Focus 2017  
Document Fiscal Period Focus Q3  
Amendment Flag false  
Entity Common Stock, Shares Outstanding   13,337,689