Amtech Systems, Inc. (ASYS) SEC Filings https://www.amtechsystems.com/investors/sec-filings/section-16-filings/rss Amtech Systems, Inc. (ASYS) - Section 16 Filings en-us https://d1io3yog0oux5.cloudfront.net/_d06263ffa350f6e22e16620b63ae2863/amtechsystems/files/theme/images/logo-sm.png Amtech Systems, Inc. Logo /investors Equisolve Investor Relations Suite <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001256949-26-000003/0001256949-26-000003.pdf Fri, 06 Mar 26 17:02:05 -0500 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001256949-26-000003/0001256949-26-000003.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096720/0001193125-26-096720.pdf Fri, 06 Mar 26 16:39:22 -0500 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096720/0001193125-26-096720.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-024720/0001104659-26-024720.pdf Fri, 06 Mar 26 16:20:19 -0500 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-024720/0001104659-26-024720.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096467/0001193125-26-096467.pdf Fri, 06 Mar 26 16:06:13 -0500 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096467/0001193125-26-096467.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-25-086997/0001104659-25-086997.pdf Wed, 03 Sep 25 16:01:39 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-25-086997/0001104659-25-086997.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-109373/0000950170-25-109373.pdf Fri, 15 Aug 25 15:33:24 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-109373/0000950170-25-109373.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-25-050117/0001104659-25-050117.pdf Fri, 16 May 25 18:27:33 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-25-050117/0001104659-25-050117.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-073717/0000950170-25-073717.pdf Fri, 16 May 25 17:30:18 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-073717/0000950170-25-073717.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-043411/0000950170-25-043411.pdf Fri, 21 Mar 25 18:53:50 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-043411/0000950170-25-043411.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-25-022964/0001104659-25-022964.pdf Wed, 12 Mar 25 16:01:34 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-25-022964/0001104659-25-022964.pdf