Amtech Systems, Inc. (ASYS) SEC Filings https://www.amtechsystems.com/investors/sec-filings/section-16-filings/rss Amtech Systems, Inc. (ASYS) - Section 16 Filings en-us https://d1io3yog0oux5.cloudfront.net/_d06263ffa350f6e22e16620b63ae2863/amtechsystems/files/theme/images/logo-sm.png Amtech Systems, Inc. Logo /investors Equisolve Investor Relations Suite <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-068888/0001104659-26-068888.pdf Mon, 01 Jun 26 16:03:45 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-068888/0001104659-26-068888.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0002136935-26-000002/0002136935-26-000002.pdf Fri, 29 May 26 13:40:13 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0002136935-26-000002/0002136935-26-000002.pdf <![CDATA[3 - Initial statement of beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0002136935-26-000001/0002136935-26-000001.pdf Fri, 29 May 26 13:36:24 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0002136935-26-000001/0002136935-26-000001.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001223192-26-000003/0001223192-26-000003.pdf Fri, 29 May 26 13:35:33 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001223192-26-000003/0001223192-26-000003.pdf <![CDATA[3 - Initial statement of beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001223192-26-000002/0001223192-26-000002.pdf Fri, 29 May 26 13:32:05 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001223192-26-000002/0001223192-26-000002.pdf <![CDATA[3 - Initial statement of beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001420485-26-000004/0001420485-26-000004.pdf Thu, 14 May 26 14:56:05 -0400 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001420485-26-000004/0001420485-26-000004.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001256949-26-000003/0001256949-26-000003.pdf Fri, 06 Mar 26 17:02:05 -0500 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001256949-26-000003/0001256949-26-000003.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096720/0001193125-26-096720.pdf Fri, 06 Mar 26 16:39:22 -0500 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096720/0001193125-26-096720.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-024720/0001104659-26-024720.pdf Fri, 06 Mar 26 16:20:19 -0500 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001104659-26-024720/0001104659-26-024720.pdf <![CDATA[4 - Statement of changes in beneficial ownership of securities]]> https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096467/0001193125-26-096467.pdf Fri, 06 Mar 26 16:06:13 -0500 https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-096467/0001193125-26-096467.pdf