<?xml version="1.0" encoding="UTF-8" ?><!-- Generated on Tue, 21 Apr 2026 04:07:18 -0400--><rss version="2.0">
    <channel>
        <title>Amtech Systems, Inc. (ASYS) SEC Filings</title>
        <link>https://www.amtechsystems.com/investors/sec-filings/quarterly-reports/rss</link>
        <description>Amtech Systems, Inc. (ASYS) - Quarterly Reports</description>
        <language>en-us</language>
                                            <image>
                <url>https://d1io3yog0oux5.cloudfront.net/_d06263ffa350f6e22e16620b63ae2863/amtechsystems/files/theme/images/logo-sm.png</url>
                <title>Amtech Systems, Inc. Logo</title>
                <link>/investors</link>
            </image>
                <generator>Equisolve Investor Relations Suite</generator>
        
                            <item>
                <title><![CDATA[10-Q - Quarterly report [Sections 13 or 15(d)]]]></title>
                <description><![CDATA[6 Related Documents: 10-Q, EX-10.1, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-039360/0001193125-26-039360.pdf</link>
                <pubDate>Thu, 05 Feb 26 16:06:51 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-039360/0001193125-26-039360.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[10-Q - Quarterly report [Sections 13 or 15(d)]]]></title>
                <description><![CDATA[5 Related Documents: 10-Q, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-104002/0000950170-25-104002.pdf</link>
                <pubDate>Wed, 06 Aug 25 16:15:46 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-104002/0000950170-25-104002.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[10-Q - Quarterly report [Sections 13 or 15(d)]]]></title>
                <description><![CDATA[5 Related Documents: 10-Q, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-069135/0000950170-25-069135.pdf</link>
                <pubDate>Mon, 12 May 25 16:03:53 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-069135/0000950170-25-069135.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[10-Q - Quarterly report pursuant to Section 13 or 15(d)]]></title>
                <description><![CDATA[5 Related Documents: 10-Q, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-014465/0000950170-25-014465.pdf</link>
                <pubDate>Wed, 05 Feb 25 16:09:35 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-014465/0000950170-25-014465.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[10-Q - Quarterly report pursuant to Section 13 or 15(d)]]></title>
                <description><![CDATA[5 Related Documents: 10-Q, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-24-092822/0000950170-24-092822.pdf</link>
                <pubDate>Wed, 07 Aug 24 16:29:45 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-24-092822/0000950170-24-092822.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[10-Q - Quarterly report pursuant to Section 13 or 15(d)]]></title>
                <description><![CDATA[5 Related Documents: 10-Q, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-24-055725/0000950170-24-055725.pdf</link>
                <pubDate>Wed, 08 May 24 16:35:57 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-24-055725/0000950170-24-055725.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[10-Q - Quarterly report pursuant to Section 13 or 15(d)]]></title>
                <description><![CDATA[5 Related Documents: 10-Q, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-24-013277/0000950170-24-013277.pdf</link>
                <pubDate>Fri, 09 Feb 24 16:20:02 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-24-013277/0000950170-24-013277.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[10-Q - Quarterly report pursuant to Section 13 or 15(d)]]></title>
                <description><![CDATA[5 Related Documents: 10-Q, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-23-040599/0000950170-23-040599.pdf</link>
                <pubDate>Wed, 09 Aug 23 16:17:44 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-23-040599/0000950170-23-040599.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[10-Q - Quarterly report pursuant to Section 13 or 15(d)]]></title>
                <description><![CDATA[5 Related Documents: 10-Q, EX-31, EX-31, EX-32, EX-32]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-23-020556/0000950170-23-020556.pdf</link>
                <pubDate>Wed, 10 May 23 16:54:01 -0400</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-23-020556/0000950170-23-020556.pdf</guid>
                                                                            </item>
                    <item>
                <title><![CDATA[10-Q - Quarterly report pursuant to Section 13 or 15(d)]]></title>
                <description><![CDATA[7 Related Documents: 10-Q, EX-10.1, EX-10.2, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-23-002163/0000950170-23-002163.pdf</link>
                <pubDate>Wed, 08 Feb 23 16:23:12 -0500</pubDate>
                <guid isPermalink="true">https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-23-002163/0000950170-23-002163.pdf</guid>
                                                                            </item>
            </channel>
</rss>