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        <title>Amtech Systems, Inc. (ASYS) SEC Filings</title>
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                <title><![CDATA[ARS - Annual Report to Security Holders]]></title>
                <description><![CDATA[ARS]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-26-020766/0001193125-26-020766.pdf</link>
                <pubDate>Fri, 23 Jan 26 13:18:56 -0500</pubDate>
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                <title><![CDATA[10-K - Annual report [Section 13 and 15(d), not S-K Item 405]]]></title>
                <description><![CDATA[11 Related Documents: 10-K, EX-4.1, EX-10.5, EX-10.6, EX-21.1, EX-23.1, EX-24, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001193125-25-314147/0001193125-25-314147.pdf</link>
                <pubDate>Wed, 10 Dec 25 16:03:21 -0500</pubDate>
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                <title><![CDATA[ARS - Annual report to security holders]]></title>
                <description><![CDATA[ARS]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-25-008847/0000950170-25-008847.pdf</link>
                <pubDate>Fri, 24 Jan 25 16:42:34 -0500</pubDate>
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                    <item>
                <title><![CDATA[10-K - Annual report pursuant to Section 13 and 15(d)]]></title>
                <description><![CDATA[12 Related Documents: 10-K, EX-4.1, EX-10.5, EX-10.6, EX-21.1, EX-23.1, EX-23.2, EX-24, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-24-135825/0000950170-24-135825.pdf</link>
                <pubDate>Thu, 12 Dec 24 16:35:01 -0500</pubDate>
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                                                                            </item>
                    <item>
                <title><![CDATA[ARS - Annual report to security holders]]></title>
                <description><![CDATA[ARS]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-24-007034/0000950170-24-007034.pdf</link>
                <pubDate>Wed, 24 Jan 24 17:03:03 -0500</pubDate>
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                                                                            </item>
                    <item>
                <title><![CDATA[10-K - Annual report pursuant to Section 13 and 15(d)]]></title>
                <description><![CDATA[14 Related Documents: 10-K, EX-4.1, EX-10.4, EX-10.7, EX-10.8, EX-21.1, EX-23.1, EX-23.2, EX-24, EX-31.1, EX-31.2, EX-32.1, EX-32.2, EX-97]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-23-070422/0000950170-23-070422.pdf</link>
                <pubDate>Thu, 14 Dec 23 16:39:14 -0500</pubDate>
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                                                                            </item>
                    <item>
                <title><![CDATA[10-K - Annual report pursuant to Section 13 and 15(d)]]></title>
                <description><![CDATA[11 Related Documents: 10-K, EX-4.1, EX-10.9, EX-21.1, EX-23.1, EX-23.2, EX-24, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-22-025872/0000950170-22-025872.pdf</link>
                <pubDate>Wed, 30 Nov 22 16:23:18 -0500</pubDate>
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                                                                            </item>
                    <item>
                <title><![CDATA[10-K - Annual report pursuant to Section 13 and 15(d)]]></title>
                <description><![CDATA[9 Related Documents: 10-K, EX-4.1, EX-21.1, EX-23.1, EX-24, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0000950170-21-004729/0000950170-21-004729.pdf</link>
                <pubDate>Wed, 17 Nov 21 16:17:46 -0500</pubDate>
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                    <item>
                <title><![CDATA[10-K - Annual report pursuant to Section 13 and 15(d)]]></title>
                <description><![CDATA[9 Related Documents: 10-K, EX-4.2, EX-21.1, EX-23.1, EX-24, EX-31.1, EX-31.2, EX-32.1, EX-32.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001564590-20-054663/0001564590-20-054663.pdf</link>
                <pubDate>Thu, 19 Nov 20 16:42:52 -0500</pubDate>
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                                                                            </item>
                    <item>
                <title><![CDATA[10-K - Annual report pursuant to Section 13 and 15(d)]]></title>
                <description><![CDATA[9 Related Documents: 10-K, EX-21.1, EX-23.1, EX-24, EX-31.1, EX-31.2, EX-32.1, EX-32.2, EX-4.2]]></description>
                <link>https://www.amtechsystems.com/investors/sec-filings/all-sec-filings/content/0001564590-19-044022/0001564590-19-044022.pdf</link>
                <pubDate>Mon, 13 Apr 20 13:15:02 -0400</pubDate>
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