Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
|
Name |
|
Jurisdiction in which incorporated |
|
Bruce Technologies, Inc |
|
State of Massachusetts |
|
|
|
|
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BTU Europe Ltd. |
|
State of Delaware |
|
|
|
|
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BTU International, Inc. |
|
State of Delaware |
|
|
|
|
|
BTU Ltd. (Shanghai) |
|
State of Delaware |
|
|
|
|
|
BTU Overseas, Ltd. |
|
State of Delaware |
|
|
|
|
|
BTU Overseas (Shanghai) Co., Ltd |
|
State of Delaware |
|
|
|
|
|
P.R. Hoffman Machine Products, Inc |
|
State of Arizona |
|
|
|
|
|
Tempress Systems, Inc. |
|
State of Texas |