Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
|
Name |
|
Jurisdiction in which incorporated |
|
Bruce Technologies, Inc |
|
State of Massachusetts |
|
|
|
|
|
Bruce Technologies Europe GmbH |
|
Federal Republic of Germany |
|
|
|
|
|
BTU Europe Ltd. |
|
State of Delaware |
|
|
|
|
|
BTU International, Inc. |
|
State of Delaware |
|
|
|
|
|
BTU Ltd. (Shanghai) |
|
State of Delaware |
|
|
|
|
|
BTU Overseas, Ltd. |
|
State of Delaware |
|
|
|
|
|
BTU Overseas (Shanghai) Co., Ltd |
|
State of Delaware |
|
|
|
|
|
P.R. Hoffman Machine Products, Inc |
|
State of Arizona |
|
|
|
|
|
R2D Automation SAS |
|
France |
|
|
|
|
|
Amtech Tempress New Energy Technologies Limited |
|
China |
|
|
|
|
|
Kunshan Amtech Tempress Machinery Equipment Co., Ltd. |
|
China |
|
|
|
|
|
Tempress Asia Holding BV |
|
The Netherlands |
|
|
|
|
|
Tempress Engineering BV |
|
The Netherlands |
|
|
|
|
|
Tempress Group Holding BV |
|
The Netherlands |
|
|
|
|
|
Tempress Holdings BV |
|
The Netherlands |
|
|
|
|
|
Tempress Hong Kong Limited |
|
Hong Kong |
|
|
|
|
|
Tempress IP BV |
|
The Netherlands |
|
|
|
|
|
Tempress Manufacturing BV |
|
The Netherlands |
|
|
|
|
|
Tempress Onroerend Goed BV |
|
The Netherlands |
|
|
|
|
|
Tempress PV-Park BV |
|
The Netherlands |
|
|
|
|
|
Tempress Systems, Inc. |
|
State of Texas |
|
|
|
|
|
Tempress Systems BV |
|
The Netherlands |
|
|
|
|
|
|
|
|