FORM 4
Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
WANSEM PAUL J VAN DER
  2. Issuer Name and Ticker or Trading Symbol
AMTECH SYSTEMS INC [ASYS]
5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
__X__ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
See Remarks
(Last)
(First)
(Middle)
C/O AMTECH SYSTEMS, INC.,, 131 SOUTH CLARK DRIVE
3. Date of Earliest Transaction (Month/Day/Year)
01/30/2015
(Street)

TEMPE, AZ 85281
4. If Amendment, Date Original Filed(Month/Day/Year)
6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security
(Instr. 3)
2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code
(Instr. 8)
4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 and 5)
5. Amount of Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 3 and 4)
6. Ownership Form: Direct (D) or Indirect (I)
(Instr. 4)
7. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V Amount (A) or (D) Price
Common Stock 01/30/2015   A   337,295 A (1) 337,295 D  
Common Stock 01/30/2015   A   120,122 A (2) 120,122 I By Family LTP (3)
Common Stock 01/30/2015   A   37,847 A (4) 37,847 I By Wife (5)
Common Stock 01/30/2015   A   29,733 A (6) 29,733 I By Family Trust (7)

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 3)
2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code
(Instr. 8)
5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)
6. Date Exercisable and Expiration Date
(Month/Day/Year)
7. Title and Amount of Underlying Securities
(Instr. 3 and 4)
8. Price of Derivative Security
(Instr. 5)
9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 4)
10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)
11. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Stock Options (right to buy) $ 30.54 01/30/2015   A   21,720   01/30/2015 05/16/2015 Common Stock 21,720 (8) 21,720 D  
Stock Options (right to buy) $ 15.23 01/30/2015   A   10,860   01/30/2015 10/31/2015 Common Stock 10,860 (9) 10,860 D  
Stock Options (right to buy) $ 12.34 01/30/2015   A   10,860   01/30/2015 05/15/2016 Common Stock 10,860 (10) 10,860 D  
Stock Options (right to buy) $ 17.6 01/30/2015   A   16,455   01/30/2015 10/26/2016 Common Stock 16,455 (11) 16,455 D  
Stock Options (right to buy) $ 16.35 01/30/2015   A   11,518   01/30/2015 05/21/2017 Common Stock 11,518 (12) 11,518 D  
Stock Options (right to buy) $ 21.24 01/30/2015   A   11,518   01/30/2015 11/01/2017 Common Stock 11,518 (13) 11,518 D  
Stock Options (right to buy) $ 27.47 01/30/2015   A   6,911   01/30/2015 05/20/2018 Common Stock 6,911 (14) 6,911 D  
Stock Options (right to buy) $ 10.82 01/30/2015   A   6,911   01/30/2015 11/03/2018 Common Stock 6,911 (15) 6,911 D  
Stock Options (right to buy) $ 9.21 01/30/2015   A   8,227   01/30/2015 06/04/2019 Common Stock 8,227 (16) 8,277 D  
Stock Options (right to buy) $ 6.08 01/30/2015   A   8,227   01/30/2015 11/05/2019 Common Stock 8,227 (17) 8,277 D  
Stock Options (right to buy) $ 7.14 01/30/2015   A   4,113   01/30/2015 06/03/2020 Common Stock 4,113 (18) 4,113 D  
Stock Options (right to buy) $ 9.94 01/30/2015   A   5,923   01/30/2015 11/04/2020 Common Stock 5,923 (19) 5,923 D  
Stock Options (right to buy) $ 8.2 01/31/2015   A   30,000     (20) 01/31/2025 Common Stock 30,000 $ 0 30,000 D  

Reporting Owners

Reporting Owner Name / Address Relationships
 Director  10% Owner  Officer  Other
WANSEM PAUL J VAN DER
C/O AMTECH SYSTEMS, INC.,
131 SOUTH CLARK DRIVE
TEMPE, AZ 85281
  X     See Remarks  

Signatures

 /s/ Robert T. Hass, attorney in fact   02/02/2015
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 4(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) Received in exchange for 1,024,900 shares of BTU International, Inc. ("BTU") common stock in connection with merger (the "Merger") of BTU Merger Sub, Inc. with and into BTU, with BTU surviving as the wholly owned subsidiary of Amtech Systems, Inc. ("Amtech"). On the effective date of the Merger, the closing price of BTU's common stock was $2.62 per share, and the closing price of Amtech's common stock was $8.20 per share.
(2) Received in exchange for 365,000 shares of BTU common stock in connection with the Merger. On the effective date of the Merger, the closing price of BTU's common stock was $2.62 per share, and the closing price of Amtech's common stock was $8.20 per share.
(3) Mr. van der Wansem disclaims beneficial ownership of the shares held by the Partnership except to the extent of his pecuniary interest.
(4) Received in exchange for 115,000 shares of BTU common stock in connection with the Merger. On the effective date of the Merger, the closing price of BTU's common stock was $2.62 per share, and the closing price of Amtech's common stock was $8.20 per share.
(5) Mr. van der Wansem disclaims beneficial ownership in shares held by his wife.
(6) Received in exchange for 90,344 shares of BTU common stock in connection with the Merger. On the effective date of the Merger, the closing price of BTU's common stock was $2.62 per share, and the closing price of Amtech's common stock was $8.20 per share.
(7) Mr. van der Wansem disclaims any beneficial ownership is shares held by the 1981 Van der Wansem Family Trust.
(8) Received in the Merger in exchange for a stock option to acquire 66,000 shares of BTU common stock for $10.05 per share.
(9) Received in the Merger in exchange for a stock option to acquire 33,000 shares of BTU common stock for $5.01 per share.
(10) Received in the Merger in exchange for a stock option to acquire 33,000 shares of BTU common stock for $4.06 per share.
(11) Received in the Merger in exchange for a stock option to acquire 50,000 shares of BTU common stock for $5.79 per share.
(12) Received in the Merger in exchange for a stock option to acquire 35,000 shares of BTU common stock for $5.38 per share.
(13) Received in the Merger in exchange for a stock option to acquire 35,000 shares of BTU common stock for $6.99 per share.
(14) Received in the Merger in exchange for a stock option to acquire 21,000 shares of BTU common stock for $9.04 per share.
(15) Received in the Merger in exchange for a stock option to acquire 21,000 shares of BTU common stock for $3.56 per share.
(16) Received in the Merger in exchange for a stock option to acquire 25,000 shares of BTU common stock for $3.03 per share.
(17) Received in the Merger in exchange for a stock option to acquire 25,000 shares of BTU common stock for $2.00 per share.
(18) Received in the Merger in exchange for a stock option to acquire 12,500 shares of BTU common stock for $2.35 per share.
(19) Received in the Merger in exchange for a stock option to acquire 18,000 shares of BTU common stock for $3.27 per share.
(20) The options vests in three equal annual installments on each of the first three anniversaries of the grant date, beginning on January 31, 2016.
 
Remarks:
Member of Management Executive Committee

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