Exhibit 21.1
 
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
 
Name           Jurisdiction in which incorporated
Tempress Systems, Inc.   State of Texas
     
Tempress Holdings B.V.   The Netherlands
     
Tempress Systems B.V.   The Netherlands
     
Tempress Manufacturing B.V.   The Netherlands
     
Tempress Engineering B.V.   The Netherlands
     
Tempress Onroerend Goed B.V   The Netherlands
     
P.R. Hoffman Machine Products, Inc   State of Arizona
     
Bruce Technologies, Inc   State of Massachusetts
     
Bruce Technologies Europe GmbH   Federal Republic of Germany
     
R2D Automation SAS   France
 
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