Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS
SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
| Name | Jurisdiction in which incorporated | |
| Tempress Systems, Inc. | State of Texas | |
| Tempress Holdings B.V. | The Netherlands | |
| Tempress Systems B.V. | The Netherlands | |
| Tempress Manufacturing B.V. | The Netherlands | |
| Tempress Engineering B.V. | The Netherlands | |
| Tempress Onroerend Goed B.V | The Netherlands | |
| P.R. Hoffman Machine Products, Inc | State of Arizona | |
| Bruce Technologies, Inc | State of Massachusetts | |
| Bruce Technologies Europe GmbH | Federal Republic of Germany | |
| R2D Automation SAS | France |
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