Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
Name  | 
    
  | 
    Jurisdiction in which incorporated  | 
   
Bruce Technologies, Inc  | 
    
  | 
    State of Massachusetts  | 
   
  | 
    
  | 
    
  | 
   
BTU Europe Ltd.  | 
    
  | 
    United Kingdom  | 
   
  | 
    
  | 
    
  | 
   
BTU International, Inc.  | 
    
  | 
    State of Delaware  | 
   
  | 
    
  | 
    
  | 
   
BTU Ltd. (Shanghai)  | 
    
  | 
    China  | 
   
  | 
    
  | 
    
  | 
   
BTU Overseas, Ltd.  | 
    
  | 
    State of Delaware  | 
   
  | 
    
  | 
    
  | 
   
BTU Overseas (Shanghai) Co., Ltd.  | 
    
  | 
    China  | 
   
  | 
    
  | 
    
  | 
   
Intersurface Dynamics, Inc.  | 
    
  | 
    State of Connecticut  | 
   
  | 
    
  | 
    
  | 
   
P.R. Hoffman Machine Products, Inc.  | 
    
  | 
    State of Arizona  | 
   
  | 
    
  | 
    
  | 
   
Tempress Systems, Inc.  | 
    
  | 
    State of Texas  |