EXHIBIT 99.2

                    AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES

                            CERTIFICATION PURSUANT TO
                             18 U.S.C. SECTION 1350,
                             AS ADOPTED PURSUANT TO
                  SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

In connection with the Annual Report on Form 10-K of Amtech Systems, Inc. (the
"Company") for the fiscal year ended September 30, 2002, as filed with the
Securities and Exchange Commission on the date hereof (the "Report"), I, Robert
T. Hass, Vice President - Finance and Chief Financial Officer of the Company,
certify, pursuant to 18 U.S.C. ss. 1350, as adopted pursuant to ss. 906 of the
Sarbanes-Oxley Act of 2002, that:

     (1) The Report fully complies with the requirements of Section 13(a) or
15(d) of the Securities Exchange Act of 1934; and

     (2) The information contained in the Report fairly presents, in all
material respects, the financial condition and result of operations of the
Company.

/s/ Robert T. Hass
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Robert T. Hass
Vice President - Finance and
Chief Financial Officer
February 11, 2003