Exhibit 99


FOR IMMEDIATE RELEASE
Contact: Robert T. Hass, CFO
         (480) 967-5146

            AMTECH SYSTEMS INC. APPOINTS KPMG AS INDEPENDENT AUDITOR

     Tempe, AZ--July 11, 2002 -- Amtech Systems, Inc. (Nasdaq_NM: ASYS)
("Amtech" or the "Company") announced that its board of directors has appointed
KPMG LLP ("KPMG") as the Company's independent auditor for the fiscal year
ending September 30, 2002. KPMG replaces Arthur Andersen LLP and the change is
effective immediately. KPMG is in the process of completing its standard client
evaluation procedures and has not yet accepted the engagement. The selection of
KPMG was made after careful consideration of several top-ranked public
accounting firms by Amtech's board of directors, its audit committee and its
management.

     For more information regarding Amtech's change of auditors, please refer to
the Company's Form 8-K filing with the Securities and Exchange Commission.

     Amtech Systems, Inc. manufactures capital equipment, including silicon
wafer handling automation, semiconductor processing equipment and related
consumables used in fabricating semiconductor devices.