SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                    Form 8-K

                                 CURRENT REPORT

                     Pursuant to Section 13 or 15(d) of the
                         Securities Exchange Act of 1934


Date of Report (Date of earliest event reported) September 13, 2000
                                                 ------------------


                              AMTECH SYSTEMS, INC.
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             (Exact name of registrant as specified in its charter)


          Arizona                    000-11412                   86-0411215
- ----------------------------        -----------              -------------------
(State or other jurisdiction        (Commission                (IRS Employer
     of incorporation)              File Number)             Identification No.)


131 South Clark Drive, Tempe, Arizona                               85281
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(Address of principal executive offices)                          (Zip Code)


Registrant's telephone number, including area code: (480) 967-5146
                                                    --------------

                                 Not Applicable
         --------------------------------------------------------------
         (Former name or former address, if changed since last report.)
ITEM 5. OTHER EVENTS.

On September  13, 2000,  Amtech  Systems,  Inc. (the  "Company")  completed a $5
million private  placement of common stock $.01 par value per share (the "Common
Stock"), of the Company and five-year warrants (the "Warrants"). The proceeds of
the private placement will be used to fund the Company's growth initiatives. The
financing  consisted of 383,000  shares of Common  Stock at a purchase  price of
$13.75 per share and  Warrants to purchase  38,300  shares of Common Stock at an
exercise  price of $15.12 per share.  In  connection  with the  issuance  of the
Common Stock and Warrants,  the Company has granted the holders  thereof certain
registration rights pursuant to a Stock and Warrant Purchase Agreement.

This  Current  Report  on Form 8-K does not  constitute  an offer to sell or the
solicitation of an offer to buy, nor shall there be any sale of these securities
in any state in which such offer, solicitation,  or sale would be unlawful prior
to the registration or qualification under the securities laws of such state.

Copies of the Form of Warrant and the Stock and Warrant  Purchase  Agreement are
attached  hereto  as  Exhibits  10.1  and  10.2,  respectively.  For  additional
discussion  regarding  this  transaction,  see also the Company's  press release
attached hereto as Exhibit 99.1.

ITEM 7. FINANCIAL STATEMENTS, PRO FORMA FINANCIAL INFORMATION AND EXHIBITS

     Exhibit No.                        Description
     -----------                        -----------
        10.1        Form of Warrant
        10.2        Stock and Warrant Purchase Agreement
        99.1        Amtech Systems, Inc. press release announcing the completion
                    of a $5 million private placement

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                                   SIGNATURES

     Pursuant to the  requirements  of the  Securities  Exchange Act of 1934, as
amended, the registrant has duly caused this Registration Statement to be signed
on its behalf by the undersigned, thereto duly authorized.

                                        AMTECH SYSTEMS, INC.



Date: September 22, 2000                By /s/ Robert T. Hass
                                           -------------------------------------
                                           Robert T. Hass
                                           Vice President and Chief Financial
                                           Officer

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