Exhibit 31.3
 
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
CERTIFICATION PURSUANT TO RULE 13a-14(a)/15d-14(a)
OF THE SECURITIES EXCHANGE ACT OF 1934, AS AMENDED
 
I, Fokko Pentinga, certify that:

1.
I have reviewed this amendment No. 1 to the Annual Report on Form 10-K of Amtech Systems, Inc. (the “registrant”);

2.
Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;



By 
/s/ Fokko Pentinga
 
 
Fokko Pentinga
 
 
Chief Executive Officer
 
 
Amtech Systems, Inc.
 
 
Date:
December 9, 2014