Exhibit 21.1
 
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES

SUBSIDIARIES OF THE REGISTRANT
 
Name
         
Jurisdiction in which incorporated
Tempress Systems, Inc.
 
State of Texas
 
 
 
Tempress Group Holding BV
 
The Netherlands
 
 
 
Tempress Holdings BV
 
The Netherlands
 
 
 
Tempress Systems BV
 
The Netherlands
 
 
 
Tempress Manufacturing BV
 
The Netherlands
 
 
 
Tempress Engineering BV
 
The Netherlands
 
 
 
Tempress Onroerend Goed BV
 
The Netherlands
 
 
 
Tempress IP BV
 
The Netherlands
 
 
 
Tempress Asia Holding BV
 
The Netherlands
 
 
 
Tempress Hong Kong Limited
 
Hong Kong
 
 
 
P.R. Hoffman Machine Products, Inc
 
State of Arizona
 
 
 
Bruce Technologies, Inc
 
State of Massachusetts
 
 
 
Bruce Technologies Europe GmbH
 
Federal Republic of Germany
 
 
 
R2D Automation SAS
 
France
 
 
 
Shanghai Kingstone Semiconductor Limited
 
China
 
 
 
Kingstone Technology Hong Kong Limited
 
Hong Kong
 
 
 
Wuxi KingCore Technology Company Limited
 
China
 
 
 
Amtech Tempress New Energy Technologies Limited
 
China