March 16, 2026 Robert C. Daigle Chief Executive Officer Amtech Systems, Inc. 58 South River Drive, Suite 370 Tempe, Arizona 85288 Re: Amtech Systems, Inc. Registration Statement on Form S-3 Filed March 13, 2026 File No. 333-294296 Dear Robert C. Daigle: This is to advise you that we have not reviewed and will not review your registration statement. Please refer to Rules 460 and 461 regarding requests for acceleration. We remind you that the company and its management are responsible for the accuracy and adequacy of their disclosures, notwithstanding any review, comments, action or absence of action by the staff. Please contact Jan Woo at 202-551-3453 with any questions. Sincerely, Division of Corporation Finance Office of Technology cc: Gregory R. Hall