Amtech Systems, Inc.

Patented Product	Amtech Systems S300 Full Batch Robot platform is a low-cost, reliable boat transfer system, specifically designed to assist the fab operator in safely loading and unloading wafer boats to all tube positions. This action normally takes place without the use of stepladders, or intermediate carriers. The S-300 Full Batch Robot platform works with any existing Furnace and Cantilever Loader and moves up or down to each cantilever level by a touch screen controller loading and unloading all boats to and from the cantilever in one motion. Solves safety and ergonomics problems Saves quartz boats from chipping and cracking Reduces operator caused wafer scrapes and particulate Retrofit kit available for 4", 5", 6, 8"and 12"wafers Minimum Foot Print of 12" (300 mm) x 50" (1270mm) All mechanical functions are built with 3x design safety factor Mounts directly on to any existing Loadstation Quick and easy installation	The S-300 Stand-alone, or interface to: SMIF (200mm) Mass Transfer Tool FOUP (300mm) Factory Host Computer Click Here for an S-300 demo
	www.amtechsystems.com