Automation for furnaces
without a loadstation
The new L-400 Tubeloader
is a very high reliability
system with
simple two axes motion, allowing
fabrication plants with simple furnaces
that
have no load stations to add automation to
their process.
This is a simple and cost effective alternative to fully
loaded load stations, eliminating the need for operators
to climb ladders
and bend down with heavy loads of expensive wafers. One L-series system
can service a
full four stack
furnace.
|
- Sets loads in the correct placement to
be pushed
or pulled from the furnace tube
- Prevents operator injuries and wafer breakage
- Systems available for all wafer sizes
- All interface is done via a touch screen
controller
- Built in folding step, stores out of the
way when not used
|
|
www.amtechsystems.com
|
