The
IBAL (Individual Boat Automation Loading system)
boatloader is designed
for the automatic loading and
unloading of wafers in horizontal furnaces.
The used material in all wafer exposure areas is mirror
polished
stainless steel, and the drive mechanism is by
way of Thompson
Rail. The digital speed control of 1 to
1,000 mm/minute is programmable
from the DPC.
A manual override is also provided.
The IBAL boatloader
is mounted to the loadstation with
fully adjustable heavy duty brackets
and is compatible
with Silicon Carbide paddles, Twin Rod systems
or
ATMOSCAN loading systems.
- Modular robot concept achieves maximum
reliability
- Zero footprint required
- Retrofit
kit available for 4", 5",
6, 8"and 12"wafers
- Mounts directly onto loadstation
- Loads individual process/baffle boats
- Interfaces with factory automation
- Reduces operator caused wafer scrapes
and particulates
- Boat loading
cycle is faster than the speed of Wafer
Transfer Machine Cycle
- Touch Screen Controller manages auto
loading and
unloading between Wafer Transfer Machine and
Cantilever, Softlander or Atmoscan
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The IBAL boatloader consists of three seperate
mechanical components
to avoid complex 3 axis positioning problems.
The Ibal is sensor -driven, self-calibrating and user friendly. There are no
setpoints to teach and no required programming by the customer.
IBAL can be installed with almost any furnace or process and will operate
at
the push of a button. Different types of boats can be used on the same stack.
The IBAL line of furnace automation
consists of the following systems:
IBAL Trolly
Wafer boat loading/unloading system for ATMOSCAN or silicon carbide paddles.
Microprocessor controlled, the IBAL uses optical sensors to guide it through
the load/unload sequences. Edge-to-edge placement of boats is guaranteed, safety
interlocks prevent undesirable contact between boats and positional load placement
repeatability is guaranteed.
IBAL
Butler
This is an elevator system designed for moving wafers from a height which is
safe and comfortable to furnace tube levels that are beyond easy reach Simple
2-axis mechanism interacts with the IBAL Trolly and IBAL Queue.
The system can be configured to service tubes 1 trough 4.
IBAL Queue
The multi-function IBAL Queue permits variable work loads and rates to be accomodated
and defines a specific location to the operator for incoming and outgoing work.
Its capacity handles variable loads from one boat to an entire run.
The quartz WIP is stored in the clean load station area prior to loading. The
IBAL Queue provides a safe and convenient location to stage boats. |
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